Accessories and Consumables

SCRV Check Valve

Main Functions

Prevent product scrap in case of emergency (power failure)

Advantages

1. No electricity required
2. Low price
3. No need to change pipelines
4. Existing customers (UMC 12A, Micron, Powerchip)

MCA ECHUCK Repair

Advantages

1. Provide low-cost and high-quality consumables
2. High quality repairs similar to new products
3. Delivery time: 4-6 weeks
4. Provide upgrade services
5. Provide 8-inch and 12-inch various Echuck repair services

Part Numbers

▲AMAT ESC
0010-01286 0010-06205 0010-12516 0010-04450 0010-27430 0010-27983 0010-24456 0010-22985
▲LAM KIYO ESC
839-800327-312 839-800327-315 839-800327-385 839-019090-374 839-019090-608

TRIAS Heater Repair and Improvement

Main Functions

Improved TEL TRIAS Heater design for longer life

Advantages

1. New design can extend the service life
2. Low price, about 30% off the original factory
3. Fast delivery time
4. Existing customers (UMC 12A, Micron)